Used BROOKS / PRI AUTOMATION ATM-407B-2-S-CE #293664249 for sale

ID: 293664249
Vintage: 2000
Robot 2000 vintage.
BROOKS / PRI AUTOMATION ATM-407B-2-S-CE is a fully integrated wafer handler for semiconductor capital equipment. This wafer handler is highly reliable, with low running costs, and is designed to interface seamlessly with other processing modules. It features an easy to use touch screen interface and advanced servo control technology for precise wafer positioning and absolute repeatable accuracy. The unit is equipped with a built-in motorized splitter to precisely divide wafers into two or four parts and a guard band to provide pre-alignment that ensures flawless delivery. The wafer transport equipment uses a precision-ground stainless steel drive belt with low friction rollers and minimized particle generation with collimator plates to reduce static buildup on the parts. The wafer handling system also offers fully automated positioning to 33 points on each cassette frame, including slippage detection, and an alarming unit to warn of any alarm conditions during wafer handling. The unit is equipped with a vision machine to check each wafer prior to loading and unloading, along with a proprietary wafer handling algorithm that detects and adjusts wafer orientations to ensure accurate placement and post-transfer imaging. BROOKS ATM-407B-2-S-CE wafer handler provides a reliable and efficient semiconductor production environment. With its robust and reliable wafer handling and imaging technology, reliable servo control, flexible splitter and guard band, and easy user interface, PRI AUTOMATION ATM-407B-2-S-CE delivers excellent performance for semicon production needs.
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