Used BROOKS / PRI AUTOMATION ATM-407B-2-S-CE #9209888 for sale

BROOKS / PRI AUTOMATION ATM-407B-2-S-CE Wafer Handler is a high performance, industry-leading automated transport module for precise and accurate handling of wafers in applications that require extreme temperature control stability. The wafer handler is designed to accommodate wafer sizes ranging from 200mm to 200 mm and is adjustable to accommodate various wafer diameters and heights. The unit is capable of providing direct pathway from source to the process tool, featuring a tray indexing mechanism for improved control of the wafer. The unit also includes an ergonomic design with an adjustable opening to aid in loading and unloading of wafers. BROOKS ATM-407B-2-S-CE Wafer Handler is capable of running in both vertical and horizontal modes, providing optimal compatibility with a wide range of process tools. The unit also features Active Stacking Technology for optimized wafer management during high volume production runs. This enables the wafer handler to reduce cycle times and improve production capability without sacrificing wafer integrity. PRI AUTOMATION ATM-407B-2-S-CE is designed to maintain chamber temperature at ±1 °C or better, providing extremely stable conditions during wafer processing. The unit features an advanced control architecture that can be programmed to meet specific wafer handling requirements. This is accomplished by easily adjustable process parameters, for example wafer speed, time delays, and up to 16 total configurable recipes. This allows wafer handlers to be accurately programmed to meet customer-defined production requirements, from validation runs to high through-put production runs. ATM-407B-2-S-CE Wafer Handler also includes front-end monitoring and diagnostics capabilities such as built-in alarms, error codes, and data logging. This helps to ensure consistent wafer integrity, as well as improved uptime and simplified maintenance. The unit also features high accuracy in wafer centering and unloading, providing repeatable process yield. Overall, BROOKS / PRI AUTOMATION ATM-407B-2-S-CE Wafer Handler is a reliable and robust wafer handling module that provides precise and accurate handling of wafers in process tools with extreme temperature control stability. The unit's adjustable width, height, and rotation ensure it is compatible with a wide range of wafer sizes, while its adjustable process parameters enable customers to fine-tune it to their own specific production requirements. The advanced control architecture, built-in monitoring and diagnostics, and high accuracy centering and loading features make BROOKS ATM-407B-2-S-CE an excellent choice for modern process technology applications.