Used BROOKS / PRI AUTOMATION ATM #9263033 for sale

BROOKS / PRI AUTOMATION ATM is an automated wafer handler designed for semiconductor wafer fabrication applications. It is a versatile robotic equipment which can be used to pick-up, transport and place wafers quickly and accurately. The system is based on an industrial manipulator arm and utilizes a suite of integrated sensors to identify and track the wafers. The ARM is made up of a series of linked arms and actuators designed to provide the vertical, horizontal and rotational motion needed for precise wafer handling tasks. The manipulator is mounted on a horizontally adjustable height base for easy access and placement. The arm is driven by an Allen-Bradley powerFlex drive unit with high-torque servo motors to provide smooth and precise motion. BROOKS ATM also includes a precision vision machine integrated into the robot arm to provide real-time recognition and location of wafers. This tool can detect wafer edges and orientation to provide accurate pick-up and placement without the need to manually specify coordinates. To improve wafer placement accuracy and reduce tooling costs, the asset also features advanced force-feedback technology which measures the contact force of the wafer onto the tooling during transfer. This ensures that the sensitivity of each wafer is taken into account by the Robot when placing them onto the tool. In addition to semi-automated wafer handling, the model is also equipped with automated process tools and process control software. It is capable of performing a variety of process steps such as sputtering, diffusion, etching, and thinning. The software can also be used to record data related to wafer processing and create batch reports with full traceability. PRI AUTOMATION ATM is a powerful and versatile tool for high-volume wafer fabrication applications. It is designed for factory integration and can be programmed to suit a wide variety of customer needs. It is robust, reliable and highly reliable and provides a low cost solution for automated wafer handling.