Used BROOKS / PRI AUTOMATION ATR-7 #9286633 for sale

ID: 9286633
Robot P/N: 002-7090-05 Blade and arm included.
BROOKS/PRI BROOKS / PRI AUTOMATION ATR-7 Automatic Transfer Robot (ATR) is a fully automated wafer handler designed for use with semiconductor processing systems. It is based on PRI AUTOMATION proprietary servo motion technology and is designed to interface with a variety of OEM processing systems. BROOKS ATR-7 is capable of transferring wafers from one equipment to the next with little to no human intervention. PRI AUTOMATION ATR-7 is a compact and lightweight machine, measuring just 30 inches tall and 17 inches wide. Its mainframe is constructed of aircraft-quality aluminum and stainless steel components, and its cover is made from corrosion-resistant aluminum. All parts of the system are mounted on a single base module for easy installation and portability. ATR-7 is equipped with two wafer trays, each capable of holding a maximum of eight 200 mm wafers. The trays are loaded with the wafers and then placed onto a grid, with the top tray connected to a drive cable. The grid is driven by a low-inertia DC servo motor, and the motion of the unit can be controlled with ease. BROOKS / PRI AUTOMATION ATR-7 is also highly reliable, due to its advanced design and high-quality components. It includes a dual-sensor machine that monitors operation and stops the tool if an error is detected. It also has an integrated gas-supply asset to control the flow of gas to the wafers for a consistent, repeatable process. BROOKS ATR-7 is designed for flexibility and includes several features to allow for connection with a variety of processing systems. Its communication ports can connect directly to several popular model models, as well as to a PC or controller. PRI AUTOMATION ATR-7 also allows for control parameters, coordinate adjustments, and various output commands to be programmed directly into the machine. In addition to its impressive features, BROOKS / PRI AUTOMATION/PRI ATR-7 is easy to use and has a user-friendly interface. It can be connected to existing wafer processing systems easily, and thanks to its intuitive user interface, operators can quickly learn how to use the machine. With its reliability, flexibility, and user-friendly design, BROOKS / PRI AUTOMATION ATR-7 is an excellent choice for any lab or industrial setting where automated wafer handling is required.
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