Used BROOKS / PRI AUTOMATION / EQUIPE ATM-107B-2-S-CE #9211141 for sale

BROOKS / PRI AUTOMATION / EQUIPE ATM-107B-2-S-CE is a wafer handler designed for loading and transferring semiconductor wafers. The handler offers throughputs of up to 5700 wafers per hour, with dual cassette decks and extremely short cycle times for high efficiency. It has an integrated twister station, where wafers are spun to allow automation of all processes. It also offers the multi-zone capability, which enables multiple process steps in one station, which reduces the cost, size, and complexity of upstream processes. The wafer handler is designed with a modular approach and can be quickly modified to satisfy unique process requirements, as well as accommodate different types of technologies. This makes the handler suitable for both discrete component and integrated circuitry fabrication. In addition, it features advanced design for process environment, including sealed ESD protectant and contamination-free construction. BROOKS ATM-107B-2-S-CE has a variety of interlocks, which ensure that all parts of the handler are in good condition. It also has automatic vision inspection capabilities, which check wafer orientation and other parameters, as well as the ability to reject wafers that are not in proper condition. Moreover, the handler offers excellent precision and repeatability for accurate wafer positioning and handling. Moreover, the machine's enhanced capability, which includes single-point wafer cutting, allows a low-residue wafer handling process, for seamless, contamination-free handling operations. To ensure optimal wafer safety, the handler also contains various preventative measures, such as vacuum collection, wafer protection shields, removable covers, ribbon cable sensors, and non-scratch parts. Furthermore, EQUIPE ATM-107B-2-S-CE is equipped with an Intel Core i7 processor, providing high-performance operation and the ability to process complex data. This wafer handler also integrates standard technologies such as Ethernet, PROFINET, DeviceNet, and MODBUS communication systems, allowing for easy integration into any facility's control system. For ease of design and production, the wafer handler is designed with a low-power, flexible architecture and modular design. This simplifies the integration process and ensures straightforward modernisation and upgrade of machinery and technology. Additionally, the handler integrates preventive maintenance, monitoring, and diagnostic features into its platform, to reduce downtime and ensure optimal efficiency.