Used BROOKS / PRI AUTOMATION ESC 212 #9194536 for sale

BROOKS / PRI AUTOMATION ESC 212 wafer handler is a fully automated wafer handling system designed for depositing and processing semiconductors. The wafer handler can handle wafers up to 6 inches in diameter and includes a variety of components, such as wafer decks, process modules, wafer lift modules, and transport modules. The wafer decks can transport wafers between decks, and is also capable of singulating wafers into individual pieces, allowing for greater surface area contact with the substrate. The process modules allow for a variety of processes to be automated, such as chemical vapor deposition, sputtering, CMP, and lithography, and are designed to maximize throughput and keep process costs minimal. The wafer lift modules facilitate wafer transfer from the transfer modules to the process modules, and can also clip wafer frames to prevent damage to fragile wafers during the transfer. The transport modules provide the necessary motion control for wafer transfer between decks and from the wafer decks onto the wafer lift modules. The wafer handler also includes safety interlocks to prevent unauthorized personnel from accessing the interior of the wafer handler, and diagnostic software for machine status verification and fault location. Furthermore, the system has a power efficiency design and features counter-balance technology to reduce energy consumption. All in all, BROOKS ESC 212 wafer handler is an effective and reliable tool for high-volume semiconductor processing operations.