Used BROOKS / PRI AUTOMATION MTR 5 #121470 for sale

BROOKS / PRI AUTOMATION MTR 5 is a single wafer handler created for use in wafer handling, such as loading and unloading wafers from a process chamber, transferring wafers to and from inspection systems, and transferring wafer frames between different tool modules. BROOKS MTR 5 is a robotic-based system, relying on a series of motorized stages, allowing it to move moment-by-moment, much like a human arm, to perform its intended functions. Its multi-axis motion makes it particularly well-suited for performing multiple operations in a flexibly defined space. It uses several pieces of cutting-edge technology such as linear drives and a variety of sensors to ensure accurate, reliable motion. Its motion controllers also allow for dynamic, dependable operation. PRI AUTOMATION MTR5 is designed to be compatible with a variety of wafer frames, and can handle up to five different cassette sizes for quick wafer sorting, loading, and unloading. Because of its modular design, a variety of different functionalities can be added or removed as needed. This includes hot-swappable cassettes, multiple station stops, autostage features, and dual-gripper operations. The user interface makes MTR 5 particularly easy to use, allowing users to set up different operations and sequences with varying levels of control. Custom sequences can also be programmed, allowing the user more control over how specific operations are performed. The robot's controller also allows users to configure the speed and acceleration of its movements, and includes a range of monitoring and troubleshooting tools that can be used to quickly identify and solve problems with wafer handling operations. MTR5 has a number of additional features that ensure safe, reliable wafer handling. These include airborne particle control, rapid shutdown operators and control, E-Stop sensors, and built-in collision detection. The system also offers tool safety monitoring, which can detect when a tool is being damaged or is near the end of its lifespan. Overall, BROOKS / PRI AUTOMATION MTR5 is an advanced, reliable wafer handler designed to simplify the process of wafer handling and transfer. Its modular design, user-friendly interface, and comprehensive safety monitoring system ensure that it can be adapted to a variety of production requirements and applications.