Used BROOKS / PRI AUTOMATION MTR 5 #9064562 for sale

BROOKS / PRI AUTOMATION MTR 5 is a one-of-a-kind wafer handler designed for high-precision applications requiring guaranteed wafer alignment, perfect vacuum hold and quick wafer swapping. It features a fully integrated 5-axis gimbal-style platform and is designed to interface with wafer metrology and optical systems. This robotic equipment offers step and repeat capability, tilt and elevation, with a wide range of configurations for various applications. It ensures accurate and repeatable placement of any type of wafer, utilizing both its patented alignment prism and its 3-dimensional vision system. BROOKS MTR 5 wafer handler is composed of three main components: a robot, a wafer holder, and a vacuum chamber. The robot is built to be both highly repeatable and precise, capable of accurate and precise motion control movements. Its maximum speed is up to 60° per second, while its positional accuracy is within 40 microns. The robot is equipped with a wide external range of accessories, such as ESD protection, pneumatics, optical sensors, and environmental controls. The Vacuum Handling Unit (VHS) of PRI AUTOMATION MTR5 contains a motorized, dual-zone vacuum chamber for die pick-up and alignment. The VHS is capable of achieving precise rotation and die alignment within a 0.5mm radius from the wafer center. The intake chamber contains several nozzles optimized for an individual wafer size, to ensure optimal suction. The wafer holder, which holds the wafer during transport, can be customized to fit any application needs. Furthermore, the wafer holder can be quickly changed for different tasks. Finally, BROOKS MTR5 comes with an S6 Edge Controller, featuring a fully integrated drive/control machine that includes sequence programming, HMI and user interface, as well as online process control. The user-friendly touch-screen greatly simplifies the operation of the robot and facilitates smooth operation and process control.