Used BROOKS / PRI AUTOMATION MTR 5 #9064565 for sale

BROOKS / PRI AUTOMATION MTR 5 is a wafer handler that is used in lithography and thin film deposition processes. BROOKS MTR 5 is a precision instrument that allows for accurate positioning and transfer of single or multiple wafers. PRI AUTOMATION MTR5 can handle wafers up to 5" in diameter and 0.3" in thickness, and it can allow up to three wafers to be processed at once. PRI AUTOMATION MTR 5 is built on an open frame architecture and has an embedded operating equipment. The system consists of a controller unit, an input interface, a low level control module, and a motor driver. Each of these components is designed to interact with one another and provide the necessary functionality for the unit. The controller unit is responsible for the operation of BROOKS MTR5. It consists of a four-axis Joystick controller, a Wafer X and Y table, and a steering wheel. The inputs from the controller are used to control the movement of the wafer table. The input interface is a touch-screen interface with a keyboard and a trackball. This allows for the user to set up automated processes and to make changes to the machine's parameters. The controller also receives inputs from the low level control module, which is responsible for the real-time control of the wafer handler. This module can be used to specify parameters such as wafer size, wafer motion speed, wafer handling clamping force, positional accuracy, wafer transfer velocity, and wafer handling timing accuracy. The motor driver is the final piece of the tool and is the unit which actually moves the wafer and positions it for processing. It consists of a stepper motor, a digital axis controller, and a drive belt. The digital axis controller is responsible for the real-time control of the motor, whereas the stepper motor is used for precision positioning and movement of the wafer. The drive belt is responsible for moving the wafer along the desired path. MTR 5 is a high performance asset that offers highly accurate wafer positioning and transfer. It is designed to allow high speed and accurate wafer transfer over short distances, making it ideal for semiconductor production. The model is able to support multiple wafers at once and offers the necessary control and safety checks to ensure that the wafers remain safely handled during production. BROOKS / PRI AUTOMATION MTR5 is a reliable and efficient equipment that is designed to provide maximum efficiency and throughput in wafer processing.