Used BROOKS / PRI AUTOMATION MTR 5 #9111006 for sale

BROOKS / PRI AUTOMATION MTR 5 is a robotic wafer handler that allows the user to perform a full range of wafer handling operations. The handler is suited for wafer diameters from 25mm to 300mm and the capability of handling wafer thickness of up to 10mm. The equipment features a high-end CCD (charge-coupled device) vision system combined with a robotic arm that allows for precision alignment and positioning of wafers. The handler can be integrated with either a PRI or BROOKS Ambassador front-end processor with options for additional modules. For operations requiring advanced pattern recognition, the addition of a Wafer Alignment Apparatus (WAA) module is available. This module is designed specifically for identifying, checking, and handling the various alignment marks which are present on the majority of wafers. Conveyor belts within the device move wafers within the product area of the robot handler, accurately locating wafers wherever required. The transport unit can reach speeds up to 600 mm/s, enabling high transfers in a short amount of time. The conveyor also features an antistatic function which helps protect the wafers from adverse electrical influences. The handler utilizes a single large-format camera which provides a detailed image to the end-user. This image is used for the recognition of pattern alignment marks or for the reading of barcodes. This saves valuable time in the manual inspection process, as the user no longer has to visually inspect the wafers to make sure of positioning and orientation. The control machine of the handler is composed of a Beckhoff PLC, surrounded by 4 touch screen monitors. The user interface is intuitive and offers the user a wide range of parameters to customize the handler's behavior. Operating conditions can be set so that robotic movements remain within tailored limits. PROGRAMs can be stored in the memory, enabling the user to quickly access and run programs for common wafer processing operations. In addition, BROOKS MTR 5 can also be linked directly to a network of other equipment and controllers, allowing for a rapid dat exchange and communication between the device and external sources. This enables an efficient data sharing and tool monitoring. Together with its powerful technical capabilities, it is easy to see why PRI AUTOMATION MTR5 is seen as one of the leading automated wafer handlers.