Used BROOKS / PRI AUTOMATION MTR 5 #9113603 for sale

BROOKS / PRI AUTOMATION MTR 5 Wafer Handler is a high precision equipment used in the semiconductor, disk drive, and other related industries. It is designed to accurately and quickly move and position silicon wafers between process chambers. It features an inspection window that allows operators to double check the wafer's alignment before it enters the chamber. BROOKS MTR 5 is operated with a multi-touch controller that includes a 3D rotary dial and a capacitive touch slider control. It includes two precision linear guides and a pre-alignment equipment with high repeatability and positional accuracy. These features, coupled with the automated operator-control system, allow the equipment to move the wafer precisely and consistently into the process chambers, increasing throughput and eliminating downtime caused by manual handling errors. PRI AUTOMATION MTR5 can be programmed with up to 32 different wafer alignment heights and pickup points, making it extremely flexible when handling multiple wafer sizes. It has a maximum wafer diameter of 200 mm, and a wafer platform size of 305 mm. The wafer handler can combine with other MTR-series wafer process accessories to create a highly functional wafer handling and process tools unit. BROOKS / PRI AUTOMATION MTR5 is designed for both wafer transport and process handling in a single unit. It includes a wafer arm, a mobile robot, and machine control which all cooperate to accurately deposit wafers into the process chamber. The wafer pickup and delivery is done through a load port, and is secured with an excentric locking tool. PRI AUTOMATION MTR 5 is equipped with a programmable vacuum pump that reduces processing time by conveniently pre-vacuuming the wafer before it reaches the loading port. With its unique self-slide design, BROOKS MTR5 also offers quick and easy access to the chamber during maintenance. To ensure a higher level of safety, MTR5 includes a centrally located safety switch that stops all robots in the wafer handling asset. This additional feature increases productivity and process capability in a safe, efficient manner. This automated operator-assisted robotic wafer handler is designed to allow trouble-free operation of the process chamber with minimal operator influence.