Used BROOKS / PRI AUTOMATION VCE 6 #9121532 for sale

BROOKS / PRI AUTOMATION VCE 6 is a high-performance wafer handling equipment designed to simplify and enhance the entire wafer size change process. It offers a compact design that takes up minimal floor space and is equipped with advanced safety features to protect both personnel and tools. BROOKS VCE 6 system is designed for use in semiconductor fabrication facilities and can accommodate 8"-12" wafers or 6"-9" wafers and is compatible with wafer cleaning, backside processing, and lithography systems. PRI AUTOMATION VCE-6 is composed of a main base station, an 11-position disk-type transporter, and a lift assembly. The main base station allows the user to quickly configure the unit to accommodate different wafer sizes and orientations. It houses a control panel and includes a display for operator interfaces and instructions and contains inputs and outputs for connecting to other automated equipment and services. The transporter and lift assemblies are connected together to allow the operator to automatically move the wafers onto the lift, grab the wafer, and place it onto the disk. The lift assembly is capable of vertical transportation as well as horizontal wafer positioning and tilt angle adjustment. It also contains an inverted motor for changing the wafer angle and a precision motor for controlling wafer movement. PRI AUTOMATION VCE 6 also contains numerous advanced safety features such as an anti-jam machine that detects jams within the transporter, sensors located within the base station and transporter to detect potential collisions, an automatic fall-off sensor in case a wafer should accidentally drop off, and an interior air curtain to minimize external dust and debris. Additionally, the tool is equipped with an automated wafer-sensing asset which is used to accurately detect wafer positions. VCE 6 is designed to be intuitive and user friendly. It includes an easy-to-use and intuitive graphical user interface with touch-screen capabilities for displaying wafer maps, and providing detailed information on each wafer. It also includes built-in user management and password protection as well as workshop integration and data logging capabilities. All of these features, combined with its advanced safety features, make VCE-6 an ideal choice for safe and efficient semiconductor fabrication.