Used BROOKS / PRI AUTOMATION ZBot #9162072 for sale

BROOKS / PRI AUTOMATION ZBot is a high-performance, fully automated wafer handler. It features a single integrated platform that reduces engineering time and effort, allowing higher equipment throughput while simultaneously decreasing the cost of materials. Integrated into BROOKS ZBot is a fully computer-driven wafer transport module that accurately moves wafers between stations with highly precise robotic positioning and vacuum pick-up. The wafer handler is customizable to suit the needs of the end user, including the ability to add additional steps to the processing flow. to suit the needs of the end user. This allows the user to create or modify existing processing workflows in order to maximize efficiency and production yields. PRI AUTOMATION ZBot is capable of running a variety of processes such as wafer cleaning, etching, deposition, dry and wet oxidation, and annealing. ZBot also enables users to take advantage of open-access automation, meaning that any part of the system can be controlled remotely from another location. In order to ensure accurate and consistent process control, BROOKS / PRI AUTOMATION ZBot is designed with multiple sensors and RFID Tag identification. This ensures that each wafer is appropriately handled and properly tracked within the unit. The advanced tracking capabilities also enable users to monitor the process history and store each wafer's individual process parameters for more efficient process management. BROOKS ZBot also offers superior reliability and safety features. Its closed-loop robotic machine allows for precise, real-time monitoring of each wafer's position and eliminates the risk of human error. It also includes safety protocols, making sure that there is no physical contact between the wafer surface and the robot arm, reducing the chance of contamination. Finally, PRI AUTOMATION ZBot tool is designed for easy setup, installation, training, and maintenance. Its intuitive graphical user interface (GUI) simplifies operation while its visual programming environment allows users to customize programming sequences with a few mouse clicks. It also includes an online help asset for troubleshooting. Overall, ZBot is a powerful wafer handler that provides efficient and reliable performance. It is designed to streamline process flows, maximize throughput, and reduce complexities all while ensuring a safe and reliable process.