Used BROOKS Techware 5 #9153587 for sale

BROOKS Techware 5 is an advanced automatic wafer handler designed with the latest advancements in robotics, mechanisms, and vision systems. Techware 5 incorporates high speed linear motion within a compact, low profile design to provide loading and unloading of wafers in one seamless operation. The wafer handler is designed to support 200 and 300 mm wafer sizes while matching the size of your process chamber for precise alignment and thermal integrity. The integrated vision system verifies wafer flatness and cleanliness, while also tracking wafers from process to process, allowing for easy operator tracking. The advanced precision of BROOKS Techware 5 is achieved through the use of integrated servo-driven linear and rotary stages with closed-loop feedback control to ensure precision and repeatability. This highly accurate motion is powered by an integrated servo drive system including a multi-core processor that operates at a rate of 2 Gbps. The controller is programmed using the latest motion-control software with built-in motion optimization algorithms to determine the optimal traverse speeds, allowing maximum throughput while ensuring high accuracy and repeatability. In addition to its precise motion control, Techware 5 is designed with advanced safety features to protect both the equipment and personnel. The operator is protected by a safety fence which acts as an interlock to prevent operation when the fence is open. An integrated light curtain feature identifies any obstacle or foreign objects that could potentially disrupt operation. An emergency stop button is also provided within the design that - when activated - terminates all motion activity and signals the operator to take appropriate action. BROOKS Techware 5 provides reliable data handling and communication capabilities, allowing it to easily be integrated into a variety of systems. It is compliant with SEMI standards E92 and E39, featuring real-time communication and integrated error detection. Techware 5 also features powerful diagnostic capabilities, using the latest network interfaces for remote access and diagnosis. Thanks to its advanced motion control, reliable communication, and high accuracy, BROOKS Techware 5 is a powerful and reliable wafer handler that is capable of providing efficient and accurate wafer handling for 300 mm wafers. It is well-suited to the demands of high-speed, repeatable environments, and its compact design makes it ideal for manufacturing processes with limited space.