Used BROOKS VTR-5 #157592 for sale

BROOKS VTR-5 is a wafer handler designed to provide precise, accurate and reliable material positioning and transport. It has a wide range of capabilities which include precise wafer positioning, transport, load / unload operations, precise speed and acceleration for precise wafer transport, wafer inspection and blocking, cassette loading and unloading, precise material transport and pressure control, and ancillary equipment control. VTR-5 is a fully automated station-to-station servo equipment which offers precise, accurate and reliable repeatability for wafer transport. It has a robust construction, simple maintenance and accuracy for production applications. The system includes a servo controller, servo amplifier, precision linear bearing, hi-resolution encoder, pulse motor and 5-axis precision stage. It also includes an advanced unit control software with real-time monitoring and control with automatic alert functions on errors. BROOKS VTR-5 is designed to quickly transport wafers between ovens and processing chambers at precise speeds, ensuring consistent quality and results. VTR-5 also features a wafer blocking machine that allows for accurate material positioning and transport. This is accomplished by accurately placing raised pins in contact with the wafer's surface which gives it the ability to stop, transport, load and unload wafers at accurate and precise locations. BROOKS VTR-5 also features a sophisticated cassette loading tool which is designed to reduce total process time by quickly and accurately loading and unloading cassettes from the station-to-station asset. This model can be easily be integrated with any other equipment. VTR-5 also includes a precise speed and acceleration feature which allows for precise speed changes for different applications, allowing for precise and accurate micro-handling of mover wafers. BROOKS VTR-5 also includes an Ancillary Equipment Control feature which allows for precise control of associated equipment such as water, gas and pressure sources. The equipment includes an advanced system control software which provides real-time monitoring and control with automatic alert functions for errors. This unit is designed for industrial use and is compatible with various wafer and chip materials. VTR-5 is an industrial-grade wafer handler designed to provided precise and accurate material positioning and transport. It features robust construction and simple maintenance combined with precise speed, acceleration and precise material transport and pressure control. With precise speed and acceleration, BROOKS VTR-5 can quickly transport wafers between ovens, processing chambers and other equipment which allows for precise and consistent results. The sophisticated cassette loading machine, wafer blocking tool, and Ancillary Equipment Control feature combine to provide a precise and reliable wafer transport asset.