Used BROOKS VTR-5 #169514 for sale

BROOKS VTR-5 is a single-wafer robotic vacuum transfer and handler equipment designated for semiconductor fabrication processes. It is designed for optimal wafer throughput and provides improved cleanliness, flexibility, reliability, and traceability. The system is able to process and monitor 100mm, 200mm, 300mm, and 450mm wafers without requiring customized loading and unloading components. VTR-5 features a vacuum transfer head that is compatible with virtually all type of wafers and a secure and repeatable transfer process. Additionally, its 12-inch, touch-sensitive, LCD control panel provides a wide range of operating, diagnostic, and maintenance information. The unit also has auto-purge and auto-center, allowing for better transfer performance and process repeatability. The machine comes with a wafer elevator equipped with 4-stage, servo-controlled, pneumatic wafer grips and a gas tight chamber that is suitable for classification level production environments. The magnetic particle-based Design Interface prevents wafer mishandling and ensuring good handling performance. Its modular design also allows for easy repair and maintenance, with quick access to the internal components of the unit. BROOKS VTR-5 also offers a superior combination of throughput and cleanliness performance with a cycle time of a mere 4.6 seconds per wafer, and it also features a real-time RFID tracking capabilities, allowing for real-time monitoring of all wafers loaded and unloaded from the tool. Additionally, its LPC transmission technology, enables wafer tracking and traceability from the wafer lots, resulting in maximum production reliability. VTR-5 is a reliable and cost-effective, semiconductor equipment that provides improved cleanliness and traceability, with a competitive cycle time with high throughput and repeatability. Its simple and modular design, coupled with its intuitive and graphic user interface, guarantees a quality production line and superior handling performance.