Used BROOKS WTM-511 #132336 for sale

BROOKS WTM-511
Manufacturer
BROOKS
Model
WTM-511
ID: 132336
Wafer Size: 8"-12"
Robot, 8"-12".
BROOKS WTM-511 Semiconductor Wafer Handler is a fully automated wafer transfer mechanism designed to increase productivity and throughput, while decreasing wafer breakage, in the microelectronics manufacturing industry. WTM-511 is a motor driven, low profile equipment that operates within a wide range of temperature, humidity, and cleanliness levels. It includes all the necessary safety features to protect the operator and the product. It is designed to handle bare and passivated wafers ranging in diameter from 150mm to 200mm at high throughput rates. The handler includes a wide range of custom parts, including a direct drive motor, low-profile clamp drive system, wafer motion control cams, high-speed optical interlock, and dual robotics lift mechanisms. The direct drive motor is capable of reaching up to 1,000 rpm and provides a high degree of accuracy and speed. The low-profile clamp release unit reduces the height of the device and prevents wafer breakage due to vertical shifts or bumps. The cam-driven wafer motion control machine accurately and consistently positions the handler to the same point every time, which increases reliability and reduces the risk of wafer damage. For additional safety, the high-speed optical interlock monitors the atmosphere conditions surrounding the handler, and takes action to stop the handler when the conditions are not within the necessary requirements. The dual robotics lift mechanism enables the operator to safely insert or remove wafers without the risk of damage. BROOKS WTM-511 is an efficient and reliable tool for microelectronics manufacturing. It increases throughput while reducing wafer breakage and protecting the operator. Its direct drive motor, low profile clamp release tool, wafer motion control cams, high-speed optical interlock, and dual robotics lift mechanisms are just some of the features that make it a perfect choice for anyone looking to increase productivity and accuracy in their semiconductor process.
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