Used COMET R2D #9397149 for sale

COMET R2D
Manufacturer
COMET
Model
R2D
ID: 9397149
Wafer Size: 6"
Wafer transfer system, 6" (3) Stations.
COMET R2D Wafer Handler is an automated, full-featured, single-wafer processing equipment designed for industrial semiconductor fabrication applications. It is an ideal solution for production, safety, and reliability. The system is highly reliable and easy to use, as it utilizes a dual-axis robotic arm with motion control and a wafer-handling tool. R2D is capable of up to 200mm wafer handling and offers a complete range of options and process tools for wafer processing, including transport, verification, etching, cleaning, and masking. The wafer handler is equipped with a powerful robotic arm that enables precise wafer motion, ideal for high-throughput production. It provides rapid and accurate positioning of wafers within a range of off-center coordinates up to 50mm from the wafer center. In addition, the arm features a high-precision sensor unit that provides free-form movement for accurate reaches and maintains a high-degree of accuracy for wafer processing. COMET R2D also includes a motor control option that enables precise and repeatable wafer motion speeds. In terms of wafer handling and process tools, the machine is equipped with multiple wafer-processing modules, including wet-etching, spin-coater, photoresist, and dry-etching, enabling full-wafer process steps from cleanroom to photolithography to etching. In addition, the tool incorporates a fully-integrated safety asset with multiple alarms and emergency stop features, guaranteeing safe operation of the device. Moreover, the model is designed for convenient and reliable maintenance, with built-in modules for easy replacement and calibration. Overall, R2D Wafer Handler is an ideal solution for industrial applications requiring high-precision and high-throughput semiconductor fabrication. The equipment provides a reliable, user-friendly and efficient solution that ensures a safe and accurate wafer processing.
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