Used DENSO RC7M-WLBA #9411594 for sale

DENSO RC7M-WLBA is a high performance wafer handler designed to meet the requirements of advanced semiconductor fabrication facilities. This state-of-the-art and reliable wafer handler is designed to transport 200mm, 300mm, and 450mm diameter wafers, with a maximum wafer size of 28.5mm and a minimum wafer size of 3mm. RC7M-WLBA is capable of operating in a wide range of process parameters, such as temperature, aligners, and vacuum level, allowing for complete process control. DENSO RC7M-WLBA is designed with a modular concept providing flexibility in installation and reconfigurations. Its structure is composed of a base, a frame, and multiple tools that allow for greater process control. As part of the modular concept, the base is composed of load ports that accept cassettes or pods for loading and unloading wafers. The frame holds the tooling modules including the aligner, cassette, vacuum systems, and the wafer handling components, which support the wafer size range to be processed. RC7M-WLBA also features an independent power supply and an integrated robot control equipment. The robot control system is responsible for operation, movement, and monitoring of the handler and its subsystems. In addition, the integrated robot control unit enables feature-based programming and provides quick response time, improving throughput. Additionally, DENSO RC7M-WLBA features a SELF-monitoring machine that monitors reel-to-reel operations, cassette exchange, and other tool operations. All information collected by this asset is stored into a memory that allows for fast data transfer and improved machine reliability. As part of the standard configuration, RC7M-WLBA includes proximity sensors that prevent collision between the handler and its environment. DENSO RC7M-WLBA wafer handler is designed for use in the following applications: epitaxy, oxidation, chemical vapor deposition, sputtering, lithography, thermal processing and wafer handling. In addition, it can be integrated into existing process tools, such as ion implanters, HB-LED deposition systems, dry etches, metrology equipment, and more. This advanced wafer handler is designed to ensure efficiency, reliability, and safety. Its design allows for easy installation, fast setup and maintenance, increasing the machine's uptime and reducing downtime. Furthermore, its modular concept permits upgrades, which helps maintain its value over time. In conclusion, RC7M-WLBA is the perfect solution for advanced semiconductor fabrication facilities.