Used ENTEGRIS / FLUOROWARE A182-50MBHLZ #54838 for sale
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ID: 54838
Wafer Size: 6"
Teflon cassettes with a front handle
Designed to be used for 6" wafers
These can be modified by cutting off the handle to become PN A182-50MB cassettes
Many available.
ENTEGRIS / FLUOROWARE A182-50MBHLZ is a high-performance robot wafer handler designed for a variety of working environments. It is equipped with an enhanced, robust and secure control equipment for automatic sorting, alignment, rotation and transfer for wafers up to 12 inches (300 mm) in diameter. The wafer handler employs a sophisticated, integrated control system to provide ultimate flexibility and accuracy in wafer handling. The Controller runs the intuitive Windows-based ENTEGRIS software, which allows unit operation, configuration and diagnostics. The operator has a wide range of process control features including pressure, speed, travel and port selection. The design of the machine keeps it reliable and easy to use, while providing high levels of accuracy with no manual input. The tool software enables the user to easily program their wafer transport, alignment and pickup speeds and movements. ENTEGRIS A182-50MBHLZ uses a powerful 100-W motor and encoder assembly that drives a two-carriage cassette robot, providing precise and repeatable wafer movement in a safe and reliable manner. The robot is also equipped with an adjustable carousel and an automated sensor asset, allowing it to quickly and accurately pick and place hundreds of wafer pockets. The integrated controller allows for full speed control and provides the momentary translational and rotational motion of the robot arms. The advanced robotics included on FLUOROWARE A182-50MBHLZ are designed to handle any wafer form factor without manual intervention. This includes up to 12 inch (300mm) wafer diameters and up to 5mm thickness variations. It also includes advanced wafer detection and alignment capabilities such as barcode and optical recognition. The onboard sensors and programming logic insure fast, secure and accurate handling of up to hundreds of wafers. A182-50MBHLZ is also feature-rich with thermal control, a protective shield enclosure, an arm reset function, pedestal alignment and automatic position restoration. The fully programmable handling parameters enable operators to set a variety of functions including speed, voyage, and port selection. The wafer handler can also interface with other sophisticated equipment such as inspection or test systems. Overall, ENTEGRIS / FLUOROWARE A182-50MBHLZ is a cutting-edge wafer handler designed for optimal performance and reliability in any working environment. As the ultimate automation solution for material handling, it can be utilized by advanced industries and companies looking to enhance production quality and deliver timely results with absolute accuracy.
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