Used ENTEGRIS KA182-60MB-47C02 #9224930 for sale

ENTEGRIS KA182-60MB-47C02 is a wafer handler manufactured by ENTEGRIS. It is designed to provide a simple yet effective means of handling wafers consistently and efficiently. KA182-60MB-47C02 features a set of components: a transport suspension assembly, wafer shipper, and a process chamber assembly. The transport suspension assembly is responsible for providing a smooth and reliable transfer of wafers from the front to the back of the handler. It consists of an orbital drive mechanism that is driven by stepper motors utilizing precision bearings and pulleys to achieve accurate movement. Additionally, scissor lifts are used to smoothly raise and lower the transport suspension assembly without causing any disturbance in the wafers. The wafer shipper is where the wafers are stored and transported over to the process chamber assembly. The wafer shipper features a vacuum-actuated chuck system that allows for quick and easy loading and unloading of wafers. Additionally, an integrated vision system is used to monitor and adjust the position of the wafer shipper for precise loading and unloading of wafers. Finally, the process chamber assembly is where the wafers are processed and handled. It contains a vacuum chamber, permitting a controlled process atmosphere, as well as various control panels and user interfaces to ensure the proper processing of the wafers. Additionally, ENTEGRIS patented, proprietary dry in/dry out handling technology allows for a contamination-free environment. The process chamber assembly also features ENTEGRIS proprietary robotic technology, which is designed to precisely move, manipulate, and handle wafers in a controlled and reliable manner. Overall, ENTEGRIS KA182-60MB-47C02 is a professional-grade wafer handler that is designed to excute precise and reliable wafer handling, making it perfect for operations requiring highly reliable and accurate wafer processing.