Used ENTEGRIS KA198-80M #293590956 for sale

ENTEGRIS KA198-80M is a wafer handler for patterning and imaging in semiconductor fabrication. It is an integrated robotic platform that is designed for use in photolithography systems. This wafer handler offers a multi-axis configuration of up to 4 axes and a sled-type arm and manipulator for moving semiconductor wafers from cassette to cassette in a sequential robotic fashion. KA198-80M has a repeatability of +80μm/single axis, a typical power supply of 80 Amps, and a steady state speed of up to 3 m/s. Its decreased settling time and low profile design allow for faster cycle times and greater throughput. It is equipped with an innovative sealed robotic arm that prevents exposure to corrosive environment, ensuring the highest level of control, precision and accuracy. The lift mechanism of the arm is designed to transfer a maximum of eight 8-inch wafers at once. ENTEGRIS KA198-80M is built with a tilted-rotation mechanism and is configured with a dedicated motor for each axis. The motor is capable of supporting a static load of up to 5 kg and a dynamic load of up to 6 kg. The maximum tilt angle for this wafer handler is ±4 degrees, which allows for targeted exposure to the IC on the wafer. KA198-80M wafer handler utilizes the latest stitching algorithms for quick recovery when bumped during operation. The advanced control algorithms enable the unit to quickly identify and recreate the exact location of the wafer so that operations can be resumed quickly. The low profile of the arm also eliminates obstruction and allows for clearance while navigating tight curves and aisles. This wafer handler is designed to integrate into a wide range of semiconductor manufacturing systems and applications. ENTEGRIS KA198-80M can be used for a variety of processes including but not limited to semiconductor manufacturing, testing, and characterization. The unit is easy to program, compact to integrate, and reliable to operate. KA198-80M wafer handler will prove to be a useful tool for facilities searching for a reliable, high-end wafer handler to meet their needs.