Used FANUC 420F #9001350 for sale
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ID: 9001350
Vintage: 1991
Robot
Type: A05B-2121-B001
Spot welder (60 kVA)
G-2 controller
Weight: 4,875 lbs
1991 vintage.
FANUC 420F is a fully featured wafer handling robot manufactured by FANUC Robotics. It is designed for handling silicon wafers in the context of semiconductor fabrication. The main features of 420F are found in four areas: motion, performance, reliability and weight. Motion is enabled by the two-arm configuration that consists of a SCARA (selective compliance assembly robot arm) and a 6-axis articulated robotic arm. Together, they allow for fast and precise linear and angular movements as well as providing coverage of large areas. Performance is also enhanced by the high-precision motor-driven servomotors in combination with the direct-drive joint-slide type absolute encoders. This allows for a fast cycle time and an increased working area. Reliability of FANUC 420F is a fundamental factor during its operation since it is designed to handle fragile wafers. Thus, the robot is equipped with several protective features including a robot status monitor, an arm protection cover, a water-cooled motor, and an option for torque sensors. Furthermore, 420F incorporates vision-based feedback for reliable automation. This feature enables the robot to receive location information directly from the wafer to facilitate its manipulation. The robot itself weighs approximately 894 lbs and can handle up to 12 wafers at a time. Optionally, this robot can also be fitted with a pick-up arm which further increases the number of wafers it can work on simultaneously. Furthermore, it comes with a battery-less memory cartridge and an I/O unit, which allow the robot to operate without being affected by external conditions. In summary, FANUC 420F is a reliable and powerful wafer handling robot that makes use of advanced features such as motor-driven servomotors, a vision-based feedback system, and an array of protective features to ensure reliable automation. Its two-arm design and capacity to handle up to 12 wafers at a time make it an ideal choice for semiconductor fabrication purposes.
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