Used FANUC Alpha T14iEe #9244558 for sale
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ID: 9244558
Vintage: 2012
Drilling center, many available
Table:
Table size: 25.5" X 15.7"
Maximum table load: 330 lbs
Travels:
X-Axis travel: 20"
Y-Axis travel: 16"
Z-Axis travel: 12"
Spindle nose to table top: 10"-23"
Spindle:
Spindle speeds: 24,000 RPM
Spindle taper: BT 30 Taper
Main motor: 21 HP
Tool changer:
Tool changer positions: 14 ATC
Rapids:
Rapid traverse (XYZ): 2125 IPM
Equipped with:
FANUC Series 31i-A control
2012 vintage.
FANUC Alpha T14iEe is a wafer handler developed by FANUC, one of the leading robotics companies. Alpha T14iEe is a high productivity, fully automated wafer handler that is capable of reaching speeds of up to 3500 wafers per hour. The T14iEe features a multi-stage vacuum robot, a compact, self-contained loading and unloading station, and a flexible, plate-driven transfer system. The multi-stage vacuum robot is designed for precise pick and place operations. It is characterized by high speed, accurate placement, and an extended working area. The compact loading and unloading station allows for short cycle times and high production throughput. The transfer system is plate-driven and includes adjustable elements that allow for various tray formats and dimensions. The T14iEe is designed to handle both 3-inch and 5-inch wafer sizes. The robot can be programmed for various recipes, such as coating, baking, laminating, and spin-coating, along with a host of other functions. The T14iEe also has the ability to integrate with advanced third-party systems for greater efficiency and process control. The T14iEe is equipped with optional features such as a wafer lock, position sensor, edge sensors, and a PLC interface. The wafer lock ensures the safe transport of wafers by preventing them from slipping off of the robot. The position sensor helps to ensure precise placement of wafers. The edge sensors detect any damages to the wafer edges. The PLC interface allows for automated control and communication with an external PLC (programmable logic controller). The T14iEe always offers reliable performance, making it an ideal choice for wafer handling needs. The robot is also compliant with SEMI standards, ensuring that it meets the highest industry specifications for accuracy and safety. The T14iEe is highly efficient and its compact size allows it to fit in tight spaces. With its versatility, fast speed, ease of use, and wide range of features, the T14iEe is a powerful and dependable solution for wafer handling.
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