Used FANUC M-6iB 6S iC #9111929 for sale

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Manufacturer
FANUC
Model
M-6iB 6S iC
ID: 9111929
Vintage: 2007
Robot system 6-Axis Run time: 2498.9 hours Supplementary arm payload axis 3: 12 Kg Repeatability: ±0.08 mm Horizontal reach: 1373 mm Capacity: 6 Kg Includes: Arm RJ3iA Controller Connection cables i-Pendant teach pendant Original documentation Training manual Power supply: 480 VAC, 50/60 Hz, 440-500 V, 3 Phase 2007 vintage.
FANUC M-6iB 6S iC is an industrial robot wafer handler, designed for use in the fabrication of semiconductor materials and devices. It is capable of holding, transporting, and positioning up to 20 wafers per batch with minimal operator intervention. The robot has an advanced torque-monitoring equipment and fine-tuned motion control for precise placement and transport of wafers. It utilizes a six-axis articulated arm with an integrated controller, allowing for 3D motion with a range of reach and repeatability for precision handling of wafers. The robot has a primary motion system consisting of six joints that enable it to move compactly and efficiently in three-dimensional space. The joints are configured as linear motions for maximum flexibility and are controlled by a series of encoders and limit switches to regulate the motion and keep track of its position. With a load capacity of 650 Kg and a reach of up to 1800 mm, the robot is designed to be able to handle any size and shape of wafers, ensuring accuracy and repeatability. The six-axis wrist can be manipulated manually or electronically for fine control of the handling process. In order to ensure safety in the workplace, the robot is equipped with multiple safety features such as overload protection, a collision detection unit, and an emergency stop function. It is designed to be compatible with most modern-day wafer fabrication systems, allowing for seamless integration into existing processes. Additionally, it has various communication interfaces such as RS-232, Ethernet, and USB, to facilitate communication with different systems. The robot is designed for high performance and can execute operations at speeds up to 800mm/s, with a repeatability of ±0.01mm. It is capable of performing complex tasks using its multiple axes, multiple preset positions, and programmable functions. Additionally, it comes with an optional vision guidance machine, which is designed to enable the robot to recognize and respond to its environment. The robot is straightforward to configure and use, and user-friendly software makes it simple to control the robot using either PC or PLC. M-6iB 6S iC wafer handler is an advanced industrial robot designed for handling semiconductor wafers with precision, repeatability, and speed. It is an efficient and cost-effective solution for wafer fabrication and can be used in various types of production environments. With its high-performance movement and safety features, it ensures accuracy and reliability for wafer handling processes.
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