Used FANUC M-6iB #9111790 for sale
URL successfully copied!
Tap to zoom
ID: 9111790
Robot system
FANUC R-J3IC controller
i-Pendant (Teach Pendant)
Cables
Axes: 6
Payload: 6 kg
H-Reach: 1373 mm
Repeatability: ±0.08 mm
Robot Mass: 135 kg
Structure: Articulated
Mounting: upright, inverted, wall, angle.
FANUC M-6iB 6-axis wafer handler is an advanced robotic solution for handling wafers. Developed by FANUC Robotics, this multi-purpose wafer handler is capable of a variety of wafer handling tasks, such as wafer inspection and sorting, automated assembly of microelectronic components, and wafer-level packaging. M-6iB's maximum payload capacity is 3kg and it has a maximum working radius of 600mm. Within this range, the wafer handler is able to reach and decide on various positions with repeatability of +-0.05mm. It is equipped with a high-durability, no-maintenance reinforced plastic coating, while its ball-screw drive mechanism provides superior load bearing capabilities and acceleration in its class. FANUC M-6iB offers users a versatile range of motion with its 6-axis configuration. The first axis is a repeating wrist rotation of up to 214 degrees, while the second axis is a pitch tilt of up to 210 degrees. A linear slide axis offers up to 360mm of stroke, and a special swivel axis allows for 360-degree rotation in a single place. The last two axis offer ridership angles of +-225 degrees. In terms of programming, this wafer handler offers Motion Code language as an easy-to-use programming method, as well as FANUC advanced PC-based software. FANUC ROBOGUIDE simulation and programming environment also allows users to visualise, simulate, and program wafer handler motion. Thanks to its payload capacity, repeatability, range of motion, and easy programming capabilities, M-6iB 6-axis wafer handler is suitable for a variety of applications in the semiconductor industry. Its robust design and powerful, versatile features makes it an ideal choice for wafer handling needs.
There are no reviews yet