Used FANUC M16iL #9082132 for sale

FANUC M16iL Wafer Handler is a precision automated device designed for handing 200mm and 300mm wafers. Its robust construction allows for rapid and accurate movement of the wafer in a variety of orientations and is outfitted with a wide range of capabilities such as wafer inspection and alignment, single tape inspection, and multi-loop handling. M16iL is composed of a handling arm, wafer support, hotlink movement equipment, XY table, and control station. Its maximum transfer speed is 140mm per second and its maximum acceleration 7500mm per second2. The repeatability of the machine is +- 0.05mm or less and allows for a maximum of 2000kg of moving load. The handling arm is made of a series of aluminum profiles that support the aluminum servo motor base, as well as the payload of up to 150kg. The arm operates through a synchronized drive system that ensures it is able to efficiently cover the entire wafer. The arm can be configured for rotary, linear and translating movements and can rotate between 0 to 190 degrees, allowing the arm to move up a full 180 degrees, in an arc-like motion, from a wafer fixture to a robot gripper. The wafer support is a motorized, sliding base plate that adjusts the size of the wafer to the size of the holder. Its closed-loop unit and motors ensure that it is accurately and precisely controlled. The base plate movement is managed by three servomotors, which are capable of providing multiple and repeat movements. The hotlink movement machine is used to accurately position the wafer along the X and Y axis of the wound. To do so, the hotlink is outfitted with four stepper motors which ensure that the accuracy and speed of the wafer's placement is guaranteed. The XY table is the central station of the wafer transfer machine. It consists of four linear slides, two servomotors and two stepper motors that control the X and Y movement of the machine. FANUC M16iL can reach speeds of up to 30mm/s with its XY table, allowing for high-speed wafer transfer. M16iL's control station is the interface between the operator and the machine. The control station allows for easy operation through a range of its features such as smooth start and stop functions, touch panel display and 10 channels for controlling the machine. In conclusion, FANUC M16iL is a precision automated wafer handling machine that can handle up to 200mm and 300mm wafers. It has a wide range of capabilities, utilizes hotlink movement and has a repeatability of 0.05mm or less. Its control station allows for easy operation and is outfitted with a range of features that ensure efficient and quick wafer transfer.