Used FANUC R2000iA 165F #9204466 for sale
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ID: 9204466
Robot
Robot controllers: RJ3iB
Robot specifications:
(6) Axes
Payload: 165 kg
H-Reach: 2650 mm
Repeatability: ± 0.2 mm
Robot mass: 1210 kg
Structure: Articulated
Mounting: Floor
Robot motion speed:
J1: 105°/S (1.83 Rad / S)
J2: 105°/S (1.83 Rad / S)
J3: 105°/S (1.83 Rad / S)
J4: 130°/S (2.27 Rad / S)
J5: 130°/S (2.27 Rad / S)
J6: 210°/S (3.67 Rad / S)
Robot motion range:
J1: ±180°
J2: +75° - 60°
J3: +230° - 132°
J4: ±360°
J5: ±125°
J6: ±360°
Robotic applications:
Cutting
Fiberglass cutting
Laser welding
Machine tending
Material handling
Spot welding.
FANUC R2000iA 165F is a wafer handling robot developed by FANUC Robotics specifically for industrial semiconductor manufacturing applications. This industrial robot is designed to work with wafers up to 165 mm in diameter, which are typically used in the production of advanced semiconductor devices. The robot can pick up wafers from either bulk source or from cassettes, and can load/unload wafers onto/from dry process equipment, such as etchers and cleaners. FANUC R-2000IA / 165F is equipped with a state-of-the-art teach pendant interface, which allows operators to easily program the robot's movements and movements related to wafer handling. This interface also offers convenient features for diagnostics of the robot's systems and components. Furthermore, it can be integrated into a larger automation netwok, allowing the robot to be monitored and controlled from a remote location. The robot is also designed to make operation simpler and reduce wafer handling time for semiconductor producers. It is equipped with a vision equipment that uses high-resolution cameras and image processing software to accurately identify, locate and pick up wafers from either bulk sources or cassettes. Furthermore, the robot can be fitted with various end-effectors to accommodate different wafer materials and sizes. In addition, the robot's movements are controlled by a motion control system that ensures high accuracy and repeatability. Furthermore, its controller can manage up to six axes for additional flexibility to meet different operational needs. The safety features of R-2000 IA / 165F are designed for optimal protection of both operators and the unit itself. A comprehensive safety cover, a light curtain for an armlock interlock machine, a proximity switch and a limit switch that can prevent the robot from motion in certain directions are just some of the safety systems implemented in this robot. In short, FANUC R-2000 IA / 165F wafer handler is a flexible and reliable industrial robot designed for wafer handling in semiconductor production. With its teach pendant, vision tool, motion controller and safety features, the robot is suitable for a wide range of semiconductor production tasks.
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