Used FANUC R2000iA 200F #9083596 for sale
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FANUC R2000iA 200F is a wafer handler equipment designed specifically for semiconductor applications. It combines industry-leading features with customizable options for fast, accurate wafer movement and manipulation. R2000iA 200F includes a high speed, non-contact and high accuracy wafer handling system for both 200 mm and 300 mm standard wafers. It is capable of both vertically and horizontally loading and unloading wafers from a robot or by manual operation. The unit embeds an ultra-high speed, non-contact wafer handling subsystem. The wafer handler utilizes a linear motor, instead of a traditional motor, to ensure superior speed, accuracy and reliability. This non-contact design also eliminates the need for fixed wafer pallets, flanges and their associated vibration, thus providing a clean, dust-free environment for the machine's operations. In addition to the high speed linear motor, FANUC R2000iA 200F also utilizes a single-beam transducer displacement measuring device (TDMS) to provide high-precision absolute position information. This information is used to execute the wafer handling operations with error-free accuracy, and ensures an exact wafer placement whether moving, placing or removing a wafer. The wafer handling subsystem is coupled with a wafer mapping tool which accurately determines all the necessary information for reliable, high-speed wafer/frame recognition. This mapping asset utilizes a laser and CCD image sensor to generate wafer/frame maps in increased detail compared to other wafer handling systems. With this information R2000iA 200F can accurately locate and pick up wafers from any orientation and with any-sized frames. FANUC R2000iA 200F is incredibly capable, reliable, and flexible wafer handling solution for all semiconductor processes. Multiple wafer handlers can be combined with support equipment, such as cleaning and sorting machines, to create a powerful wafer manufacturing line. With its combination of robustness and precision, R2000iA 200F is the ideal wafer handling model for handling today's fragile and high capacity wafers.
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