Used FANUC R2000iB / F165 #9253600 for sale
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ID: 9253600
Robots
With R-30iA controller
Carried weldgun
Material handler / Sealer
Material handler / Pedestal weldgun / Engraver.
FANUC R2000iB / F165 is a wafer handler dedicated to providing efficient and reliable semiconductor wafer processing. It features a compact design with a moveable axis motion equipment that makes it ideal for semiconductor wafer fabrication and test processes. The motion system consists of a rigid base frame, 4-axis arm, and a servo-controlled linear axis. The 4-axis arm has a travel range of 600mm in the X-Y plane and up to 900mm in the Z-Axis. The arm is also equipped with a Flange D type connector for end-effector mounting and a precision repeatability of 0.02mm. R2000iB / F165 is equipped with a digital contouring control unit, enabling precise controller of the motion axis. This helps in maximizing workflow efficiency and accuracy. It also features a high-speed wafer handling capability, allowing it to process up to 13 wafers per minute. It also offers two independent wafer positioning modes - flat lift or random tilt, for improved handling of different size wafers. FANUC R2000iB / F165 is encased in a cabinet-style housing that provides adequate protection for the machine components. It is designed to withstand high temperature and humidity conditions, making it suitable for a range of wafer-handling applications. To ensure reliable operation during operation at high speeds, the tool is equipped with a dynamic balancer that reduces vibration and noise. It also has a fully-integrated, adjustable pneumatic clamping asset that enables easy and secure wafer handling. As an advanced wafer handler, R2000iB / F165 provides a wide range of safety features. It is equipped with collision protection, allowing it to react to sudden load or object changes that may occur during the operation. It also has a guard shielding model that prevents contact with the moving parts. Moreover, it features redundant safety devices such as optical sensors that can detect any unexpected changes in operation. In conclusion, FANUC R2000iB / F165 is a reliable and advanced wafer handler that offers high speed and precision performance. Its compact design, precision control equipment, adjustable pneumatic clamping system, and wide range of safety features make it an ideal choice for semiconductor wafer processing applications.
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