Used FUJI EC-201 #9289924 for sale

FUJI EC-201 is a versatile wafer handler designed for both small and large applications. It is capable of handling wafers up to 200mm in diameter and can handle up to 200 wafers per hour. The unit consists of a wafer loader/unloader unit and a wafer handling head that move independently of each other, allowing for precise alignment of the wafers during the load/unload and handling cycle. The wafer loader/unloader unit is equipped with an air nozzle for vacuum transport and adhesive films for alignment. Additionally, a cassette loader with a split plate device is available to grasp and move large wafers of different sizes. The wafer handling head is equipped with a vacuum chuck to securely clasp wafers and provides precise rotation and positioning of the wafers in the handling chamber. The built-in stepper motor, along with a linear encoder for position control, facilitates precise alignment and handling of the wafers during transport. A Z-axis movement mechanism allows for greater flexibility in transport orientation. EC-201 Wafer Handler is equipped with a safety system that Cut-airfoils hazardous air from entering the handling chamber, protects the wafers from damage due to static electricity or foreign objects, and monitors the vacuum chuck for proper operation. Additionally, a sixteen-setting programmable unit allows for easy changeover and automatic finish of the handling cycle without replacing parts. By providing users with a reliable and efficient transport system, FUJI EC-201 Wafer Handler is a great aid for those handling wafers in the semiconductor, microelectronics, and medical industries. The low noise of the wafer handling head and the controlled environment of the handling space makes it the perfect device for robotic wafer handling.