Used GENMARK GPR Series #9409854 for sale

Manufacturer
GENMARK
Model
GPR Series
ID: 9409854
Robot arm System controller, P/N: 9800106581 Wafer flat detector.
GENMARK GPR Series of wafer handlers is designed to provide and advance a sophisticated method of handling and transferring large-scale, flat wafer processing applications. It is intended to provide an automated, high-performance solution for wafer handling at advanced nodes size devices. The handler is capable of various sizes and standards of 8 inch (200 mm) and 12 inch (300 mm) wafers, and is able to handle multiple wafers of 25 mm (thickness) per cycle. Furthermore, its high speed, superior performance and superior stepper control ensures accurate control and positioning for wafer handling and transfer. The handler is integrated with GENMARK high-performance profile controller and super-high speed X/Y motion control capabilities. With these, it can effectively and efficiently position wafers for multi-axis movement and transfer. It also ensures perfect signal integrity and traceability by collecting and reporting exact measurements from the process plans. It is also designed for usage in ultra-clean rooms. Its arm are designed and coated to eliminate particles, consisting of both high quality anti-static and anti-consumption materials. It meets the requirements of tight tolerance and excellent contamination control by fulfilling the requirements needed in the high-end, precision wafer handling sector. GPR Series wafer handlers are engineered to handle and process ultra-complex structures. It is capable of processing thin wafers, double-side processes, and multi-frame in one process cycle. It also has a high complex communication interface to allow secure data exchange between devices. Moreover, the wafer handler is capable of automatically sensing wafer sizes, tracking wafers for traceability, and improving transfer accuracy by eliminating particles. The handler also feature intuitive criteria-based teaching for positioning, allowing operators to easily create, manage and transfer programs. All in all, GENMARK GPR Series of wafer handlers are advanced solution for handling and transferring large-scale, flat wafer processing applications. With its sophisticated capabilities, its high-performance profile controller, and its tight tolerance and excellent contamination control, it provides for superior wafer handling and processing of ultra-complex structures.
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