Used GENMARK X5062 #9153695 for sale
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GENMARK X5062 is an ultrafast wafer handler designed for semiconductor production. It is capable of transferring, inspecting, and propelling wafers of various sizes in a precise and efficient manner. Its accurate and reliable handling system make it highly suitable for applications involving ultra-high-precision sub-100µm semiconductor operations. X5062 consists of a universal mount base unit fitted with two high-precision linear actuators. Each actuator has a movable platform whose range of motion is controlled by a precision electronic servo motor. The V-shaped, anti-static wafer handler can work with both rigid and elastic wafers. The unit can also be suspended from a vertical belt or oscillate along a linear route for increased accuracy. GENMARK X5062 offers a variety of features to improve overall efficiency. It utilizes a hybrid motion control system; comprising of a combination of direct-driven and stepper motors. This ensures maximum speed and accuracy while performing wafer-handling operations. Additionally, the handler is equipped with an XYZ auto scale-in feature for supersonic precision positioning. This enables X5062 to accurately detect and adjust any tilt or deviation within seconds. To ensure precise transfer, GENMARK X5062 can be linked with a variety of wafer-sensing devices. It features an automatic wafer tracker that scans for wafer markers while transferring and stops the motion when it detects an error. Similarly, the load-sensing clutch enables the unit to automatically detect the presence of the wafer before any transfer operation. The user-friendly Graphical User Interface (GUI) allows users to easily program and control the functions of X5062. The GUI provides operators with a set of intuitive commands and other parameter setting options, directly from a connected PC. GENMARK X5062 provides a fast, reliable, and precise wafer-handling solution for semiconductor production. Featuring advanced motion control and wafer-sensing technologies, X5062 ensures precise transfer and handling of ultra-small, microscopic wafers. It is a perfect solution for ultra-high-precision semiconductor operations.
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