Used HIRATA HNC-US566-6 #9111398 for sale

HIRATA HNC-US566-6 is a robotic wafer handler designed for the reliable loading and unloading of thin wafers. It utilises a high speed, high precision gantry robot to accurately transfer wafers between process tools, load locks and carriers. The robot is designed to operate in a Class 1 cleanroom environment and can handle wafers up to 6 inches in diameter. It features a camera that tracks the wafer's progress and helps with precise placement of the wafer based on its exact location. The robot has three degrees of freedom which allow it to move in the x, y and z plane for precise placement and high speed movement. Its grippers can handle wafers up to 0.8mm thick, which makes them suitable for a wide variety of applications. In addition, it has a self-check function which monitors all of its components and can detect and report errors in its operation. The load and unload processes are conducted in a Class 1 cleanroom environment which minimizes particle contamination during handling. The robot also has a load lock system that prevents contamination from entering the interior of the robot when moving wafers from one tool to another. To safeguard operation, cleanliness, and security, it has an Safety Interlock System (SIS) that monitors all of the robot's actions. HNC-US566-6 is a reliable and efficient wafer handler that is suitable for various applications. Its high speed, precision, and accuracy make it an ideal solution for loading and unloading wafers in a cleanroom environment. Its safety features also ensure that it operates without compromising the product or other components, making it a reliable and cost effective automation solution.