Used ILHOTECH ITAL-500 #9392926 for sale

ILHOTECH ITAL-500 is a high precision wafer handling equipment that is designed for processing compound semiconductor wafers through a variety of semiconductor device fabrication steps. This system features a vacuum robot arm that can lift and transfer wafers up to 150 mm in diameter between multiple workstations. This arm can precisely position wafers while also providing a completely dry environment which is necessary during semiconductor processing. The key components of the unit are the robot arm, the tooling fixture and the micro-drive machine that control the robot's motion. The robot arm is designed to fit any standard 100 mm or 150 mm semiconductor transfer station, enabling it to handle almost any type of wafer material, including oxide, polysilicon, gallium arsenide, and germanium-silicon substrates. Furthermore, the robot arm is designed to be compatible with any automatic loading/unloading station or tool. The base of ITAL-500 is an industrial-grade, robust frame that is constructed to provide stability even under high weights and vibration. The base has a reinforced moveable platform that enables the asset to provide wider range of movements, while also supporting high accuracy motion. The model also utilizes highly accurate and reliable Delta Drive micro-drive units, allowing for high speed, precise and repeatable positioning of the tools. The tooling fixture of this wafer handler is designed to provide a secure platform for process tools, as well as a vacuum connection for transferring and gripping wafers. The fixture also features a quick-change tool mechanism that allows for easy and straightforward tool exchange. The tooling fixture is also equipped with touch-and-go sensors for high precision alignment of wafers in both the horizontal and vertical directions. Other features of ILHOTECH ITAL-500 are an integrated vision equipment for detecting wafer orientation and edge position, a fully automated recipe-based process, and a comprehensive web-based monitoring and control system. The unit is designed to be simple to operate and maintain, and provides full inter-process communication between the different stages of the fabrication process. Moreover, ITAL-500 is compliant with the safety standards of semiconductor fabrication processes. Overall, ILHOTECH ITAL-500 is an effective and reliable wafer processing machine designed to meet the demands of the semiconductor industry. It provides precise and repeatable motion of process tools for high-yield processing of semiconductor wafers. Its comprehensive design enables high accuracy and fast wafer handling, making it suitable for a wide range of production needs.