Used JENOPTIK INFAB SLR 200 LPTS/L #9259819 for sale

JENOPTIK INFAB SLR 200 LPTS/L is a high precision wafer handler specifically designed for handling delicate semiconductor wafers. It is equipped with an advanced linear positioner to ensure precise alignment of the wafer during handling. This positioner is interfaced with a control unit which ensures high accuracy of the positioner's movements. The SLR 200 LPTS/L has three independent axes of motion (X, Y, R) for maximum flexibility in handling wafers of any size and shape. The X-axis can move the wafer from 135mm to 270mm and the Y-axis can move the wafer from 165mm to 280mm, while the R-axis can move the wafer from 375° to infinitesimal degree rotation. The SLR 200 LPTS/L is able to handle a wide range of substrates, including all grades of Silicon, SiGe, GaAs, and other materials. It supports wafers of any size and shape, from 200mm to 330mm in diameter. Furthermore, it is capable of performing a wide range of processes from cleaning and de-scumming, to etching and polishing. It is also capable of performing complex wafer inspection and metrology tasks. The SLR 200 also features comprehensive safety features, such as wafer detection during handling and alert mechanisms for detecting any potential damage. The SLR 200 LPTS/L comes with a sophisticated software package, featuring software protocols for scaling tested processes, process pattern scheduling, automated testing sequences, and other advanced features. The software package also enables remote control and monitoring of the machine from any location. Overall, JENOPTIK INFAB SLR 200 LPTS/L is a high precision wafer handler, designed for high accuracy handling and automated processing of different substrates in the semiconductor industry. Its advanced linear positioner, expansive motion range, comprehensive safety features, and sophisticated software package make it particularly suitable for a variety of wafer processing tasks.