Used KAWASAKI TS220-D511S #9088881 for sale

KAWASAKI TS220-D511S wafer handler is a mass production equipment designed to accurately and reliably transfer, rotate, and inspect fragile semiconductor wafers up to 8″. The finely balanced and robust mechanisms employed ensure high throughput with minimal damage to sensitive wafers, as well as highly precise and consistent alignment throughout the entire cycle. TS220-D511S consists of several modules, including the main processors, rotator, conveyor and stocker units. The main processor unit features a controller that processes signals received from the rotator, conveyor and stocker units in order to control the transport of wafers between the different components, as well as enabling adjustments to be made on the fly. The rotator unit employs a high-torque brushless motor to accurately spin wafers in order to achieve a level of rotation accuracy not possible with traditional stepper motors. The conveyor employs a combination of suction and free-fall techniques to ensure consistently smooth movement of wafers, with the smoothness of the motion achieving impressive levels of accuracy throughout. The stocker unit is a highly reliable and compliant unit, and is designed to hold up to sixty-five 8″ wafers, along with several smaller wafers, securely. KAWASAKI TS220-D511S is designed to run reliably and efficiently, achieving performance standards of 1 μm in wafer transfer positioning accuracy, 0.02° in rotation accuracy, and 10 ms in wafer processing time. It also has a built-in vision system that allows for automated wafer inspection, improving throughput and elimination of defects in the process. Additionally, an event driven stand-alone operating unit is employed to ensure smooth and reliable operation of the machine. Additional features of TS220-D511S include maintenance support through built-in diagnostics, automatic notification of parts replacement, safe programming through a PC, and complete traceability of process parameters, all of which contribute to greater efficiency and the assurance of optimal operation and product quality. Most importantly, KAWASAKI TS220-D511S is designed to be both affordable and easily maintained, providing a reliable and economic solution to the demands of the semiconductor industry. The large number of additional features make TS220-D511S an attractive mass-production machine for demanding semiconductor production processes.