Used KAWASAKI TS310-D511S #9144125 for sale

Manufacturer
KAWASAKI
Model
TS310-D511S
ID: 9144125
Robots for DAINIPPON SK-2000.
KAWASAKI TS310-D511S is an automated wafer handler designed for use in laboratories around the world for a broad range of research and development applications. It is ideally suited for the production, transfer, testing, and inspection of semiconductor wafers. It features a modular design made up of independent components that can be customized to meet the needs of a specific application or environment. This wafer handler uses a compact linear motion guide to drive the dock transfer handles in a straight line. It achieves precise transfer of wafers by providing a combination of guiding and precise drive motion. The dock transfer handles are equipped with a vacuum system and are capable of handling wafer sizes up to 150mm (6.0 inches). Additionally, this wafer handler is capable of handling Cassette-Wafer, Cassette-Cassette and Cassette-to-Open Placement. TS310-D511S utilizes an easy-to-use touchscreen operation panel with a variety of configuration and transfer settings. This allows for quick and easy setup and operation to meet specific application needs. It features an intuitive graphical user interface that allows you to quickly move parameters for production rate optimization and maintain consistent product quality. KAWASAKI TS310-D511S can be configured to accommodate a wide range of wafers, from 8-inch to 150mm. It offers three different modes for wafer handling: continuous transfer, repetitive transfer, and one-off transfer. Its fullyautomatic functionality can detect wafer thickness and transfer repeat wafers in desired positions. This ensures accurate positioning of the wafers. To ensure reliability and user safety, TS310-D511S is equipped with various safety mechanisms. It automatically checks for abnormal rubber fixtures and aborts loading in the event of an overly long loading time. Other safety features include a door proximity switch and an emergency stop button that instantly shuts off the machine upon operation. KAWASAKI TS310-D511S is an automated wafer handling system designed for a broad range of applications. Its modular design and user-friendly interface allows users to quickly and easily adjust and configure the machine's parameters for optimized production and consistent quality. The machine's variety of safety features also ensures reliable and safe performance.
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