Used KENSINGTON CSMT-4 #9078959 for sale
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ID: 9078959
Wafer Size: 6"
Station Sorting/Mapping Tool System, 6"
Wafer Handling robot with Dual Paddle for High Throughput
Advanced Cassette Sort Merge/Randomize/Split Capability
Cassette Tilt Scanning/Mapping System with Transmissive Metrology
Measures Actual Wafer Positions in Cassettes
Detects Two-wafers-in-a-slot & Cross slotted wafers
Wafers Handled through slot center for minimal contamination and gentle handling
High Speed, High Resolution Prealigner
Foresight OCR Recognition System
OS/2 Operating System with Touch Screen Color Display: Pentium PC
User Friendly Graphical Interface for all operations and Recipe Generation
Ergonomic Stainless-Steel Frame
Better that Class-1 Clean Room Compatibility
Fail-Safe, Integrated Vacuum/Motion Controllers (Kensington Model 4000)
Automatic Error-Condition Recovery
Smooth, Digitally-controlled DC Servo Actuation of all axes
Direct Motion Metrology of all axes: Fully Distributed Force/Position Feedback Sensing
Automatic Tilt-Back locates Wafers against back of cassette: prevents migration
90° Tilt-Back Cassette Loading/Unloading addresses Carpel Tunnel Syndrome Concerns
Colored Light System Status Beacon
Un-interruptible Power Supply/Back-up Vacuum (UPS/BUV) System. 110VAC AC 50/60 Hz
Automatically Unloads all wafers safely into their cassettes on total loss of power
Keyboard Drawer
Mirror-Bright #8 Electro-polished Laminar Flow Frame Top
X-Windows Software
Installation and on-site support
System Options:
GEMS/SECS-II Interface
Intel Ether Express W/TCPIP or HSMS.
KENSINGTON CSMT-4 is an advanced automated wafer handler designed for high-volume production of 300 mm silicon wafers for the semiconductor industry. The handler is capable of carrying up to four (4) wafers and loading them into a chemical vapor deposition (CVD) equipment or process chamber. It includes a robot arm that picks up the wafers from a cassette and places them into the processing system. The handler also contains a vacuum unit for handling wafers during Process Cycles. CSMT-4 wafer handler offers a host of features that make it a reliable and versatile tool for automated wafer processing. Its advanced robot arm allows for high positioning accuracy and smooth, precise motions, allowing it to accommodate a wide variety of wafer sizes. The vacuum machine is designed to ensure that the wafers remain securely in place during a process cycle, eliminating the chances of wafer breakage from air turbulence or vibration. The detection tool can automatically detect the size of the wafer, providing real-time feedback and accurate position information, even for large wafer sizes. The handler also features an easy-access cover for simpler maintenance and inspection without requiring tooling or dismantling of the robot arm. The integrated control asset allows for procedure programs to be stored and executed without having to instruct the robot arm. There is also an integrated safety guard and interlock model that provides complete protection of the machine's internal components, making it safe to use in an industrial environment. KENSINGTON CSMT-4 is a proven, reliable automated wafer handler designed to meet the highest production and performance demands of the semiconductor production industry. It provides a reliable, safe and economical solution for handling and processing silicon wafers with high positional accuracy and minimal human intervention. The handler is capable of accommodating a wide variety of wafer sizes and process cycles, making it a reliable solution for high-volume production and improved process efficiency.
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