Used KENSINGTON Equinox #81777 for sale
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ID: 81777
Robot, includes controller, maximum radial reach of arm and end-effector: 18" from the centerline of the robot, dual end effector configuration, safe working envelope diameter with the arm in the center position and a wafer on the end-effector is 21".
KENSINGTON Equinox is a high-precision wafer handler designed for efficient and cost-effective operations in the semiconductor industry. The equipment is equipped with a patented topography-based wafer gripping mechanism, enabling accurate and stable substrate handling. The system is also highly reliable and customizable, allowing users to modify key components such as transfer kits, flexing belts, conveyors, and chuck plates- thus maximizing efficiency and allowing precise handling of a variety of wafer sizes and shapes. The unit has three main components - a control cabinet, an upper stage module and a wafer zero positioner. The control cabinet contains an industrial PC, PLC and HMI workstation which are connected via CANopen communication and allow efficient setup and programming. The upper stage module is located on the upper arm and is responsible for transferring and gripping the substrate. It comprises of a linear drive stage, a rotary servo and a wafer gripper. The wafer zero positioner is the integrated component that determines the precise orientation of the substrate, allowing for accurate wafer handling with no risk of scratches or other damages. In addition, Equinox offers a broad range of features and capabilities. Its built-in vacuum pre-bond pump for immediate bonding enables high precision handling. The vacuum pre-bond pump also has auto-adjustment and a surface temperature monitoring machine which ensures precise and temperature-controlled bonding and positioning. Further, this tool has an integrated vision asset which allows for precise detection of the substrate. High speed and precise operation are key advantages of KENSINGTON Equinox. The model has an advanced contour follower function which ensures smooth and rapid wafer movement across the surface without any damage, thus providing strong process control and cost-saving benefits. All these features are designed to provide high performance with maximum accuracy, reliability and cost efficiency. Overall, Equinox is a highly advanced and reliable wafer handler, which is suitable for use in a variety of semiconductor fabrication processes and can deliver highly precise, damage-free and cost-effective substrate handling.
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