Used KLA / TENCOR Phoenix D 1.2 #9285868 for sale

KLA Phoenix D 1.2 is a high performance wafer handler designed for front end semiconductor processing. The Phoenix D 1.2 features an extensive set of automation capabilities, enabling it to act as a complete, stand-alone equipment capable of managing all aspects of wafer handling. It is designed to work with a variety of substrates, such as silicon, crystalline quartz, and silicon on insulator (SOI). The Phoenix D 1.2 has a heavy-duty frame designed to provide stability and support during wafer handling. It features an automated puck transport system to provide efficient, accurate movement of wafer pucks from transport station to station. This unit helps minimize the contamination risk caused by manual handling and also ensures accuracy of wafer position during transport. It also has an integrated vacuum machine that helps to securely and safely transfer the individual wafers from the storage pods to the processing station. The Phoenix D 1.2 also includes advanced motion control capabilities, allowing it to precisely rotate and tilt each wafer while in transport. It has two vacuum pods which can hold up to three wafers per pod, and a maximum speed of 8.3 inches per second, allowing for fast and accurate wafer handling. The Phoenix D 1.2 supports a wide range of interfaces to facilitate communication with other wafer handling systems and instrumentation. It has several input/output ports for connecting to external devices, including a USB port, RS-232 ports, Ethernet ports, and analog ports. The Phoenix D 1.2 also includes advanced software for controlling all aspects of the wafer handling process, including motion control, temperature control, and communication between devices. The Phoenix D 1.2 is compliant with SEMI standards, including SEMI E77 for wafer handling systems, and SEMI C85 for process equipment interface. This ensures a high degree of reliability, process uniformity, and compatibility with other wafer handling systems and instrumentation. Overall, TENCOR Phoenix D 1.2 is a high-performance wafer handler designed to provide efficient, accurate, and reliable wafer handling. Its extensive set of automation capabilities, along with its compliant with SEMI standards, make it an ideal choice for front-end semiconductor processing.