Used LAM RESEARCH 002-0016-04 #293669986 for sale

ID: 293669986
Wafer Size: 8"
Armset, 8".
LAM RESEARCH 002-0016-04 is a multi-function wafer automation handler designed to support both single wafer and multi-wafer processes for high throughput and reliable handling of 200mm wafers. The equipment is designed with a dielectric wall, particle filtered recirculation/vent, easy access port and removable wafer tray resulting in significantly reduced airborne particulates and aiding in safeguarding workpiece and tool integrity. 002-0016-04 handler is designed to provide high speed, precise and repeatable motion over a broad range of temperatures. It is equipped with a range of sensors and motion controllers for accuracy, speed, and repeatability. It also features a high-motor torque system for power and speed, a programmable user interface, and an intuitive operation unit to ensure ease of use. For applications requiring cleanroom environment, LAM RESEARCH 002-0016-04 handler uses 3 stages of air filtration, particle and temperature monitoring, and humidity control to ensure product integrity and uniformity. The machine is also designed to accommodate a wide variety of tool formats and wafer sizes, allowing the user to optimize their process for maximum flexibility and cost efficiency. The tool provides the ability for manipulation of wafers over a wide range of temperatures in a variety of working environments from room temperature up to 300 Degrees Celsius. It is also capable of supporting processes that require multiple wafer configurations and transfer. The asset provides consistent accuracy and repeatability on all wafer transfers with a high-precision motion controller and encoder-based model for perfect alignment every time. 002-0016-04 handler is equipped with a variety of technologies that enhance the user experience. It incorporates high-speed camera systems to achieve inspection, positioning, and alignment capabilities. It also features a programmable logic controller, allowing the user to easily program parameters for quick and efficient wafer handling. LAM RESEARCH 002-0016-04 handler is designed to provide a safe and reliable workplace. It is outfitted with air-flow protection technology to eliminate the risk of contamination from airborne particles while protecting personnel during operation. Additionally, it includes a variety of safety features that allow the user to safely operate the equipment. 002-0016-04 wafer handler is the perfect tool for a wide variety of multi-wafer and single wafer process applications. It is dependable, precise, and repeatable, making it an ideal choice for anyone in the semiconductor industry who needs a reliable wafer handling system.
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