Used MANZ Z10 #9123461 for sale
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ID: 9123461
Vintage: 2009
Wafer handler
Compressed air 6 bar
Filter capacity: ≤ 40 μm
Consumption: 200 l / min
Uninterruptible Power Supply (UPS)
Emissions:
Sound level in 1 m distance: ≤75 dB(A)
Temperature area: +10 to +40 °C
Humidity rating: 10% to 75 %
Power supply: 400 V, 40 A, 50 Hz, 15 kVA
2009 vintage.
MANZ Z10 is a fully automatic wafer transfer and handling equipment. It enables efficient and reliable transportation of wafers in a cleanroom environment and can handle most wafer sizes, ranging from 50mm to 150mm in diameter. The system has a fully enclosed design that minimizes particle contamination as well as dust generation. The operator is given complete control over wafer handling operations through the use of an easy to use graphical user interface. The loading mechanism allows for both wafer cassettes and FOUP's to be processed separately or simultaneously. Z10 is equipped with a vision unit that is capable of inspecting each wafer for defects. It can detect particles, scratches, breaks, and points of non-uniformity. The integrated defect detection machine is extremely precise, able to detect defects down to 9.2 micrometers in size. For more accurate inspection, a magnified version of the product can be displayed. The wafer handling equipment is designed to eliminate human interaction with the product and reduce the chances of errors and contamination. It is able to recognize when wafers between different sizes are present and adjust the position of the load head accordingly. The tool is also capable of identifying a foreign object on the surface of the wafer and reject it while preventing any potential damage to the surrounding wafers. MANZ Z10 is capable of loading and unloading wafers up to 100 times faster than manual processes. This makes it ideal for high-speed production and can significantly increase the throughput of wafer transport and handling. Vacuum gripping technology is also employed to ensure safe and accurate transfer of the product. The asset also comes with an audible alert model and external interlock capability, so operators can operated the machine with confidence. Overall, Z10 is a robust and reliable wafer handling equipment that offers both precision and high-speed wafer transfer. Its integrated defect detection system, vacuum gripping technology, and fully enclosed design guarantee particle-free handling and minimal chances of contamination or errors. The unit is also easy to use, making it suitable for both high-end production and research applications.
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