Used MECS UT0100 #9157918 for sale
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MECS UT0100 is a high-performance wafer handler designed for around-the-clock operation in an automated wafer fab environment. The equipment utilizes an advanced technology that features multi-axis robots, manipulation equipment, and unique algorithms. UT0100 provides up to four independent workstations, each capable of processing up to 300 mm diameters of wafers. MECS system is ideal for multiple-sided front-end automation solutions and provides a wide range of flexible solutions. The wafers are precisely controlled in pitch, yaw and tilt by high accuracy servo motors. The powerful and reliable MECS UT0100 wafer handler offers high throughput and consistency. It can be used for both single- and multi-process handling, with auto-repeat and auto-alignment capabilities. The unit provides high resolution monitoring and control of the manipulator arm drive and parameters. Furthermore, there is an intuitive graphical user interface and built-in fault detection and diagnostics. The advanced multi-axis robots used in UT0100 machine are highly efficient and make it possible to perform short cycle times and precise movement over long distances. With high sensitivity to position and precision motion, the robots are also able to resolve very small distances with great accuracy. They feature several levels of communication protocol support, and more than 50 software commands for robot control. This allows the robot to be programmatically operated by external controllers. In addition, MECS UT0100 is a two-stage wafer handler with transfer arms for loading wafers into and out of the tool. This enables the asset to rapidly access wafers and apply robust processing functions. The model also has been designed particularly for high-vacuum systems, and is equipped with a variety of sensors to provide optimal vacuum control and equipment health status. UT0100 offers a range of friendly and easily configurable features to optimize operations. The advanced encoding capability provides precise control along the full range of axes, while the twin drive modules with servo motors yield high precision movement. Moreover, the wafer handler has undergone intensive testing and is certified with a complete API suite, making it ideal for local or global production environment.
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