Used MECS UTC-800P #9097821 for sale

MECS UTC-800P is a wafer handler utilized in semiconductor factories for the transfer of up to 8" wafers. The handler is designed to support CVD, Etch, Diffusion, Spin-rinse-dry, Lithography, PVD, and related processes. MECS UTC 800 P boasts a high throughput of up to 60 wafers per hour and can provide precise and reliable transfer operations. The table-top design allows for a clean and easy integration with existing process equipment and its innovative modern architecture of wafer handling components ensures high-efficiency operation for time-sensitive processes. The wafer handler features a 'loadlock' equipment which uses nitrogen or clean air supply for wafer transfer throughout the system. This unit reduces the air exchange between the transfer chamber and the outside environment, enabling efficient maintenance of the cleanroom atmosphere. UTC-800P is loaded from the front side with 8" slit cassettes, cassettes with magazines and FOUP. The handler can control the position and the speed of each robotic arm and actively reject wafers with faulty position or orientation. It also has a protection plate to reject errant wafers. Furthermore, it is equipped with an optical and hard-motion position check machine to ensure precise operation. Safety is a key feature in UTC 800 P design. It has a two-point wafer guidance tool and conforms to SEMI S2/FSE standards. The handler has been developed with collision detection and prevention technology, a robust frame structure and a reinforced body for secure operation. It also features dynamic wafer breakage prevention, dynamic wafer corner detection, along with an emergency stop function and a dynamic interlock asset. MECS UTC-800P is a capable, reliable and highly secure wafer handler for the semiconductor industry. Its innovative components and strict safety standards are designed to deliver accurate transfers even in the most demanding operations, making it the perfect choice for factory processes.