Used MECS UTX-1100 #66910 for sale
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ID: 66910
Wafer Size: 8"
Vintage: 2000
Wafer handler, up to 8"
UTX1100 robot
CS1000 controller
OF250 wafer aligner and controller
Stored in a cleanroom
2000 vintage.
MECS UTX-1100 is a wafer handler specifically designed for semiconductor processing with maximum precision. The handler is based on a working area of 450 millimeters by 450 millimeters and operates on a vacuum grabbing equipment. This system allows for wafer sizes from 75 millimeters to 300 millimeters in diameter to be handled efficiently. The two-axis-motion unit is designed to move the rotated wafer through all operations of the entire wafer handling process. The motor drive can reach speeds up to 300 mm/sec, which allows for quick, accurate movement between wafer cassettes and processing tools. UTX-1100's robust design includes a protective cassette housing chamber that protects wafers from contamination, along with a special dual chamber protection machine that ensures proper operation even in highly demanding conditions. The handler also includes a precision linear encoder tool and a fine adjustment module, ensuring accurate fine positioning and movement. Its sophisticated software controller can be easily programmed and managed to allow for efficient automation of workflows and reduce downtime due to errors or malfunctions. MECS UTX-1100 can control the pressure of the vacuum clutches and grippers to ensure the wafer is firmly held in place while it is being processed, eliminating the possibility of it slipping or being displaced during the operation. The built-in auto-bed alignment asset helps to automatically adjust the wafer cassette position for maximum efficiency. UTX-1100 is designed for easy maintenance, making it ideal for high-volume production lines in the semiconductor industry. Its stainless steel construction and integrated dust and liquid protection makes it highly durable and allows for the safe and reliable handling of wafer materials.
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