Used MGI ET 1000 #9221426 for sale

MGI ET 1000 is a wafer handler designed for compact and precise loading/unloading of wafer pods, as well as the transfer of these wafers in and out of the processing tool. It is a fully automated 6-axis robot that is capable of stationary or dynamic operation, and is capable of accommodating up to 15 wafers. The unit provides a 6-axis turret with an independent vacuum tool changer and programmable wafer coordinates for precise positioning of the wafer during transfer. The tool operates within a limited space of 380 (W) x 590 (D) x 305 (H) mm. Its maximum moving speed is as much as 250 mm/sec, allowing for high throughput and fast wafer loading and unloading. MGI ET1000 is equipped with an advanced image acquisition system for assured high accuracy of positioning. The unit has built-in safety standards and can be used to interface with leading software packages. The unit also has a high-precision positioner with fine positional adjustment capability. The unit's wafer handling system consists of two parallel linear stages, to which a vacuum drift indexer is mounted. The wafer pod is placed directly onto the vacuum drift indexer, and the robotic arm does the required movements in order to load or unload the wafers as requested. ET-1000 is designed with user safety and convenience in mind. It has built-in safety switches for wafer alignment and collision detection, as well as automatic wafer detection and failure handling functions. It also has worksite protection to prevent operator accidents. Its slimline design ensures that it does not occupy an unnecessary amount of space. Overall, MGI ET-1000 is an effective wafer handler that offers robust and accurate performance in a compact and reliable package.