Used MITSUBISHI RH12-SDH8535-S12 #9205259 for sale
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ID: 9205259
Robot
With CR2 controller cable
(2) 2D-TZ378 Interface cards
R56TB Pendant teach panel.
MITSUBISHI RH12-SDH8535-S12 wafer handler is a member of the RH12 family of wafer handlers and supplies and provides reliable high-speed performance for wafer processing. It is a semi-automated wafer loading machine designed to manage and process 12-inch or smaller wafers with high precision and low risk. RH12-SDH8535-S12 is a static handler and is equipped with two independent pallets enabling efficient wafer processing. One of the pallets is used for the wafer loading while the other is used for wafer unloading. MITSUBISHI RH12-SDH8535-S12 has an advanced Wafer Identification Code (WIC) equipment that ensures precise and error free handling. The WIC system is able to identify the wafers through a unique code which is embedded into each wafer and helps the machine identify the wafer's location within the pallet. RH12-SDH8535-S12 also features a manual operation mode and a computerized operation mode. In manual operation mode, operators can manually check and confirm the status of the wafer handling process and can also control and adjust the processing speed and parameters. In the computerized operation mode, the machine can be simultaneously managed by an operator and a controller (via Pascal Language). The controller can also be remotely operated via an Ethernet connection. MITSUBISHI RH12-SDH8535-S12 is equipped with an easy access cassette station which simplifies wafer loading and unloading. It also features a wafer caliper unit which automatically measures the wafer diameter for correct handling. RH12-SDH8535-S12 also features a wafer tracking machine which monitors and records the wafer processing status. The machine has a modular design which is capable of being easily connected with other modular units to provide additional functions to the wafer handler. It is also capable of interconnecting with wafer reclaim systems, oxidation, deposition, photolithography and etching systems via the Ethernet connection port. Finally, MITSUBISHI RH12-SDH8535-S12 is equipped with an industrial operating tool (OS) and supports most major wafer environmental, safety and security requirements such as SEMI E84/E122. It's own in-built software allows for easy monitoring, diagnostics, and reporting capabilities and provides a secure and reliable platform for wafer operations.
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