Used OLYMPUS FR3200 #293830855 for sale
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OLYMPUS FR3200 is a fully automated wafer handling system used for processing wafers in semiconductor applications. It is designed to be used in a variety of processes, such as thermal processing, photolithography, etching, polishing, and encapsulation. FR3200 is equipped with automatic wafer exchange, auto-inject/dispense, and capable of handling wafers up to 8" diameter. OLYMPUS FR3200 is equipped with a three-axis wafer robot for precise positioning and movement. The wafer exchange station is used to connect the handler with the process tool. FR3200 can interface with optional auto-inject/dispense modules, allowing the operator to have control over the wafer load and unload process without manually loading or unloading wafers. This reduces the manual labor involved in loading or unloading wafers. It is capable of high throughput, with up to 30 wafers per hour on the 8" models. The wafer handler is designed to be operator friendly, with a large color touchscreen display for navigating options and settings. The display includes a real-time process monitor and a complete set of menus, which are user friendly to navigate. The wafer handler also automatically checks the process conditions and will alert the operator if there are any faults or irregularities in the process. OLYMPUS FR3200 is equipped with anti-collision sensors to protect both the wafer handler and the process tools from collisions. The wafer handler includes vibration and shock absorbers to protect the wafers during the handling process. FR3200 is designed for use in a cleanroom environment and has a Class 1000 cleanroom rating. It includes HEPA filtration to ensure that the wafers remain contaminant-free during the process. In addition, OLYMPUS FR3200 is equipped with a built-in humidity and temperature control system to ensure optimal conditions for the process. FR3200 is designed for easy maintenance and repairs. It includes quick release parts and components that can be replaced quickly, reducing maintenance and repair time. It is also equipped with automated preventative maintenance and diagnostic capabilities, ensuring that the machine is running optimally at all times. In conclusion, OLYMPUS FR3200 is a fully automated wafer handling system designed for use in a variety of semiconductor processes. It is capable of high throughput, with up to 30 wafers per hour on 8" models. It is equipped with a three-axis wafer robot, auto-inject/dispense module, and anti-collision sensors for precise positioning and safety. Additionally, FR3200 is designed for easy maintenance and repair, and includes built-in humidity and temperature control for optimal process conditions.
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