Used RECIF MGI ALI6 #191000 for sale

RECIF MGI ALI6 wafer handler is an automated wafer handling equipment designed for advanced materials research and semiconductor production. The system consists of a high-performance wafer-handling robot and an integrated wafer-handling subsystem, offering full flexibility and repeatability across a variety of materials processes. The ALI6 includes a dual arm high-speed articulated robot with a total reach of 650mm and full 360-degree access. It has a maximum speed of 4700 mm/s2, positioning precision of 0.1 mm and is capable of open loop torque control. It is capable of carrying up to four wafers at a time, with an empty weight of 3.2kg per wafer. The robot's high precision and repeatability accurately positions the wafer over the process chamber for optimal process results. The wafer-handling subsystem incorporates features such as wafer orienting, lifting and cleaning functions, as well as a software-controlled temperature control unit. This is designed to ensure accurate and repeatable temperature control within +/- 0.5°C of the desired setpoint. The machine operates with 320mm, 200mm and 150mm-diameter wafers, capable of step and repeat wafer movement. The wafer-handling subsystem has a maximum speed of 0.9 m/s and a maximum acceleration of 1G. MGI ALI6 is an innovative, automated wafer handling tool, with a unique combination of features that has been specifically designed to ensure reliable and repeatable wafer processing. It provides a high-performance platform to support a wide range of materials processing and production tasks, providing reproducible results every time. The integrated wafer handling subsystem has been optimized for short cycle times, ensuring quick and accurate wafer processing for improved throughput.